Optical Magnetron Sputtering System

Multifunctional optical sputtering coating system for AR coatings, HR coatings, color films and precision optical thin-film applications.

Overview

This system is designed for multilayer optical coating processes. Multiple coating materials can be arranged around the fixture for sequential deposition of stacked thin-film layers.

AR CoatingsHR CoatingsColor FilmsOptical Thin Films

Key Features

Multilayer Coating

Supports sequential deposition of multilayer optical film stacks.

Flexible Target Layout

Multiple coating materials can be arranged for complex optical coating processes.

Optical Applications

Suitable for lenses, display panels, HR coatings and decorative optical films.

Applications

Optical LensesCamera LensesAutomotive Display PanelsAR CoatingsHR CoatingsColor FilmsUV/IR Cut Filters

Technical Specifications

Vacuum Chamber SizeΦ1800 × 2100 mm, customizable

Workpiece Fixture SizeΦ1600 × 1400 mm

Fixture Rotation Speed0–50 rpm

Film Thickness ControlQCM

Sputtering Source4 pairs / 8 targets

Ion SourceAnode layer ion source / PLASMA

High Vacuum Pumping System3 TMP

Rough Vacuum Pumping System630 mechanical pump + 1200 roots pump

Ultimate Vacuum≤ 3.0 × 10⁻⁴ Pa

Pump-down TimeApprox. 15 min from atmosphere to 3.0 × 10⁻³ Pa

Temperature Control0–300 °C

Need a customized coating solution?

System configuration, chamber size, target arrangement, pumping system and process modules can be adapted according to substrate geometry, film stack and production requirements.