Components & Consumables
Looking for specific parts or consumables?
We offer a complete ecosystem of spare parts and consumables, combining reliable performance with cost-effective solutions. For detailed specifications and model availability, please contact us.
Contact UsVacuum Pumping Systems
Mechanical Pumps
Roots Pumps
Diffusion Pumps
Turbo Molecular Pumps
Power & Utility Systems
DC Power Supplies
MF Power Supplies
RF Power Supplies
Cryopump
Cooling Water Systems
Coating Materials & Tooling
Planar Targets
Rotary Targets
Target Drive Units
Evaporation Materials
Customized Fixtures